- Australia
Category :Gas Purification System,
The Adsorption. Catalyst. and Getter Purifiers utilize a combination of getter and adsorption-catalytic processes to provide ultra-high purity gas. Outlet impurity levels are reduced to sub-ppb or ppt levels. Two adsorption-catalytic beds (columns. vessels) removes 02, CO, CO2 and H20 while the downstream getter vessel, operated at an elevated temperature. eliminates N2 and CH4. Two columns alternate between purification and regeneration modes. providing continuous purification. The purifiers use multiple columns processes designed to provide ultra-high purified gases for semiconductor. flat panel display, LED and solar cell applications. as well as it can be manufactured from high flow rates of 5 to 600 Nm3/h and optionally high pressure up to 200barg(3000psig).
Standard Features
Optional Features
The Adsorption. Catalyst. and Getter Purifiers utilize a combination of getter and adsorption-catalytic processes to provide ultra-high purity gas. Outlet impurity levels are reduced to sub-ppb or ppt levels. Two adsorption-catalytic beds (columns. vessels) removes 02, CO, CO2 and H20 while the downstream getter vessel, operated at an elevated temperature. eliminates N2 and CH4. Two columns alternate between purification and regeneration modes. providing continuous purification. The purifiers use multiple columns processes designed to provide ultra-high purified gases for semiconductor. flat panel display, LED and solar cell applications. as well as it can be manufactured from high flow rates of 5 to 600 Nm3/h and optionally high pressure up to 200barg(3000psig). Gas Purified: Argon (Ar), Helium (He), Hydrogen(H2), Nitrogen(N2)
