Gas abatement - Dry type
Gas abatement - Dry type

Gas abatement - Dry type

Category :Abatement systems,

Abatement of semiconductor and display process exhaust stream using adsorbent and absorbent media. | Implant gas (AsH3, PH3, BF3, etc.) | Corrosive gas (F2, Cl2, BCl3, HBr, etc.) | High abatement efficiency (TLV at post abatement)Built-in by-pass cartridge for redundancy. | HVM (High Volume Manufacturing) proven

Abatement of semiconductor and display process exhaust stream using adsorbent and absorbent media. | Implant gas (AsH3, PH3, BF3, etc.) | Corrosive gas (F2, Cl2, BCl3, HBr, etc.) | High abatement efficiency (TLV at post abatement)Built-in by-pass cartridge for redundancy. | HVM (High Volume Manufacturing) proven

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