• Australia
  • +6597204778
  • sales@cleantechservices.sg
Clean-tech Tube Fittings
  • Singapore
  • India
  • Philippines
Clean-tech Tube Fittings

Menu

  • Home
  • About-us
    • About-us
    • Our Team
    • Company Profile
    • Our Partners
    • Our Customers
    • Our Memberships
  • Achievements
    • Certificates
  • Services
    • Total Gas and chemical solutions
    • Total Facility Hook up
    • TGCM and Training
    • Engineering and BIM Drawings
    • Sustainability, Energy Management and third-party validation services
    • Supply of all Gas and Chemical Critical components
  • Products
    • All Products
    • Gas delivery systems
    • Chemical delivery systems
    • Abatement systems
  • Media
    • News Highlights
    • Press Releases
  • Contact-us
  1. Home
  2. Products
  3. Slurry Dispense Module
Slurry Dispense Module

Slurry Dispense Module

Category :Chemical delivery systems,

The Slurry Dispense Module is designed to deliver slurry containing submicron abrasive particles and chemical reagents to Chemical Mechanical Planarization process tools. With the aim of minimizing surface defects to ensure effective polishing, the system comes with built-in filters with excellent retention of agglomerates while allowing desired slurry particles to pass through and reach the wafer surface. The system design and component selection involve meticulous engineering to provide high levels of efficiency and reliability. The system is commonly paired with our Slurry Transfer Unit and a day tank to provide a continuous supply of slurry for high consumption. The system is integrated with modern and precise metrology to ensure that only high-quality slurry is delivered consistently.

Standard Features

  • Fully-automated pump switchover function for uninterrupted slurry delivery
  • Automatic system shutdown from hardware safety interlocks
  • Automatic slurry quality analysis during delivery (online metrology)
  • Loop pressure monitoring and control to ensure constant pressure at point of use
  • Optimal piping layout and design
  • Centrifugal pump for high-flow applications
  • Redundant pumps and filters
  • Automatic pump and filter priming
  • Automatic system flushing and purging
  • Differential pressure monitoring across filters
  • Humidified N2 for drum or tote blanketing
  • UPW or UN2 spray gun
  • Auxiliary media pressure sensors for pneumatic system

Safety Features

  • Isolated process and electrical enclosures
  • CDA-purge function for electrical enclosure
  • Audible and visual alarms and warnings
  • Local and remote EMO
  • Exhaust flow detection
  • Cabinet leak detection
  • Utility service leak detection
  • Door interlock system
  • Failure Modes and Effects Analysis (FMEA)

System Control

  • Siemens SIMATIC S7 series PLC
  • Siemens SIMATIC Comfort Panel HMI
  • User authorisation and password protection HMI
  • Multilingual operational guide on HMI
  • Manual actuation of pneumatic valves
  • Linkage to supervisory control and data acquisation (SCADA) system for remote system monitoring and control

Optionss

  • Diaphragm pump with pulsation dampeners, stroke counter and leak detection
  • Fab-wide slurry recirculation with temperature monitoring and control
  • Day tank capacity up to 2000 L
  • Day tank enclosure
  • High-precision radar sensor for day tank
  • Pressure and flow indicators at pump outlet
  • Loop consumption monitoring
  • FM4910 Fire Retardant Plastics enclosure
  • Manual system flushing and purging

The Slurry Dispense Module is designed to deliver slurry containing submicron abrasive particles and chemical reagents to Chemical Mechanical Planarization process tools. With the aim of minimizing surface defects to ensure effective polishing, the system comes with built-in filters with excellent retention of agglomerates while allowing desired slurry particles to pass through and reach the wafer surface. The system design and component selection involve meticulous engineering to provide high levels of efficiency and reliability. The system is commonly paired with our Slurry Transfer Unit and a day tank to provide a continuous supply of slurry for high consumption. The system is integrated with modern and precise metrology to ensure that only high-quality slurry is delivered consistently.

You Might Also Like

View Details
Chemical Dispense Systems (CDS)
View Details
Chemical Valve Manifold Box/ Control Valve Box (VMB/CVB)
View Details
Chemical Collection Cabinets
View Details
Slurry Transfer Unit
Get In Touch
Clean-tech Tube Fittings. 9, 200 Targo Road Girraween NSW 2145
Need Help
sales@cleantechservices.sg
+6597204778
+6597204778
+6597204778
Know More
About-us
Partners
Certificates

© 2025 Clean-tech Tube Fittings. All rights reserved.
Powerd by U-Bsol