Slurry Dispense Module
Category :Chemical delivery systems,
The Slurry Dispense Module is designed to deliver slurry containing submicron abrasive particles and chemical reagents to Chemical Mechanical Planarization process tools. With the aim of minimizing surface defects to ensure effective polishing, the system comes with built-in filters with excellent retention of agglomerates while allowing desired slurry particles to pass through and reach the wafer surface. The system design and component selection involve meticulous engineering to provide high levels of efficiency and reliability. The system is commonly paired with our Slurry Transfer Unit and a day tank to provide a continuous supply of slurry for high consumption. The system is integrated with modern and precise metrology to ensure that only high-quality slurry is delivered consistently.